Three-dimensional sound intensity measurements using microflown particle velocity sensors

This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micromachined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realised based on a three-dimensional micromachined particle velocity microphone, a 3D Microflown, and a miniature pressure microphon

A parametrized three-dimensional model for MEMS thermal shear-stress sensors

This paper presents an accurate and efficient model of MEMS thermal shear-stress sensors featuring a thin-film hotwire on a vacuum-isolated dielectric diaphragm. We consider three-dimensional (3-D) heat transfer in sensors operating in constant-temperature mode, and describe sensor response with a functional relationship between dimensionless forms of hotwire power and shear stress. This relationship is parametrized by the diaphragm aspect ratio and two additional dimensionless parameters that represent heat conduction in the hotwire and diaphragm. Closed-form correlations are obtained to represent this relationship, yielding a MEMS sensor model that is highly efficient while retaining the accuracy of three-dimensional heat transfer analysis. The model is compared with experimental data, and the agreement in the total and net hotwire power, the latter being a small second-order quantity induced by the applied shear stress, is respectively within 0.5% and 11% when uncertainties in sensor geometry and material properties are taken into account. The model is then used to elucidate thermal boundary layer characteristics for MEMS sensors, and in particular, quantitatively show that the relatively thick thermal boundary layer renders classical shear-stress sensor theory invalid for MEMS sensors operating in air. The model is also used to systematically study the effects of geometry and material properties on MEMS sensor behavior, yielding insights useful as practical design guidelines

A Three Dimensional Microflown

An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor

Eroding ribbon thermocouples: impulse response and transient heat flux analysis

We have investigated a particular type of fast-response surface thermocouple to determine if it is appropriate to use a one dimensional transient heat conduction model to derive the transient surface heat flux from the measurements of surface temperature. With these sensors, low thermal inertia thermocouple junctions are formed near the surface by abrasive wear. Using laser excitation, we obtained the impulse response of these commercially available devices. The response of particular sensors can vary if new junctions are created by abrasive wear. Furthermore, the response of these sensors was found to deviate substantially from the one dimensional model and varied from sensor to sensor. The impulse response was simulated with greater fidelity using a two dimensional finite element model, but three dimensional effects also appear to be significant. The impact of these variations on the derived heat flux is assessed for the case of measurements in an internal combustion engine. When the measured impulse response is used to derive the surface heat flux, the apparent reversal of heat flux during the expansion stroke does not occur

An experiment in manipulator control with proximity sensors

Optical proximity sensors were used in a feedback loop to automatically position a manipulator hand for grasping. The experiment was a simplified one, involving two dimensional motion only. Two proximity sensors were mounted on the hand, and control signals derived from their outputs were used to drive the hand vertically and horizontally. The sensors employ a pulsed gallium arsenide light-emitting diode together with a silicon detector. They indicate, without contact, the approximate distance between the manipulator hand and object in the range from 5 to 12 cm. Positioning within approximately + or - 5 mm was observed. Extension of the technique to general three-dimensional control is briefly discussed

Learning and Transfer of Modulated Locomotor Controllers

We study a novel architecture and training procedure for locomotion tasks. A high-frequency, low-level "spinal" network with access to proprioceptive sensors learns sensorimotor primitives by training on simple tasks. This pre-trained module is fixed and connected to a low-frequency, high-level "cortical" network, with access to all sensors, which drives behavior by modulating the inputs to the spinal network. Where a monolithic end-to-end architecture fails completely, learning with a pre-trained spinal module succeeds at multiple high-level tasks, and enables the effective exploration required to learn from sparse rewards. We test our proposed architecture on three simulated bodies: a 16-dimensional swimming snake, a 20-dimensional quadruped, and a 54-dimensional humanoid. Our results are illustrated in the accompanying video at https://youtu.be/sboPYvhpraQComment: Supplemental video available at https://youtu.be/sboPYvhpra

Experiments and simulations of MEMS thermal sensors for wall shear-stress measurements in aerodynamic control applications

MEMS thermal shear-stress sensors exploit heat-transfer effects to measure the shear stress exerted by an air flow on its solid boundary, and have promising applications in aerodynamic control. Classical theory for conventional, macroscale thermal shear-stress sensors states that the rate of heat removed by the flow from the sensor is proportional to the 1/3-power of the shear stress. However, we have observed that this theory is inconsistent with experimental data from MEMS sensors. This paper seeks to develop an understanding of MEMS thermal shear-stress sensors through a study including both experimental and theoretical investigations. We first obtain experimental data that confirm the inadequacy of the classical theory by wind-tunnel testing of prototype MEMS shear-stress sensors with different dimensions and materials. A theoretical analysis is performed to identify that this inadequacy is due to the lack of a thin thermal boundary layer in the fluid flow at the sensor surface, and then a two-dimensional MEMS shear-stress sensor theory is presented. This theory incorporates important heat-transfer effects that are ignored by the classical theory, and consistently explains the experimental data obtained from prototype MEMS sensors. Moreover, the prototype MEMS sensors are studied with three-dimensional simulations, yielding results that quantitatively agree with experimental data. This work demonstrates that classical assumptions made for conventional thermal devices should be carefully examined for miniature MEMS devices

Analysis and acoustooptical measurements of bulk and surface acoustic wave fields

The development of multielement ultrasonic transducers having full field amplitude and phase control is discussed. In addition, the measurement of the surface particle displacement caused by an idealized impulse load on the surface, the three dimensional mapping of acoustic fields using optical scanning techniques, and the measurement of two dimensional stress distributions using embedded optical fiber sensors are addressed